HJ

Haili Jia

SC Shanghai Micro Electronics Equipment (Group) Co.: 1 patents #81 of 212Top 40%
Overall (All Time): #2,964,407 of 4,157,543Top 75%
1
Patents All Time

Issued Patents All Time

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
9760022 Lithography machine workpiece table and vertical position initialization method thereof Feihong Liao, Yuebin Zhu, Shuping Hu 2017-09-12