Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10345720 | Photolithography tool and method for compensating for surface deformation in carrier of photolithography tool | Yinlei Wei, Fuqiang YANG | 2019-07-09 |
| 9760022 | Lithography machine workpiece table and vertical position initialization method thereof | Yuebin Zhu, Haili Jia, Shuping Hu | 2017-09-12 |