Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10353297 | Moving platform device, exposure device and lithography machine | Yuebin Zhu | 2019-07-16 |
| 9964864 | Silicon wafer edge protection device | Xu Zhou, Haicang Cui, Fei Ni | 2018-05-08 |