Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11788829 | Simultaneous phase-shift point diffraction interferometer and method for detecting wave aberration | Peng Feng, Zhongliang Li, Yang Bu | 2023-10-17 |
| 11668625 | Apparatus and method for detecting wavefront aberration of objective lens | Peng Li, Feng Tang, Yunjun Lu, Yang Liu, Xiangyu Wei +2 more | 2023-06-06 |
| 11604418 | Multi-channel device and method for measuring distortion and magnification of objective lens | Yisha Cao, Feng Tang, Yang Liu, Yunjun Lu | 2023-03-14 |
| 11561082 | Method for compensation during the process of wavefront reconstruction in grating-based lateral shearing interferometry | Peng Li, Feng Tang, Yunjun Lu, Yang Liu | 2023-01-24 |
| 11340118 | Method for high-accuracy wavefront measurement base on grating shearing interferometry | Yunjun Lu, Feng Tang | 2022-05-24 |
| 11215512 | Light intensity fluctuation-insensitive projection objective wave aberration detection device and detection method thereof | Feng Tang, Yunjun Lu, Changzhe Peng, Yang Liu | 2022-01-04 |
| 11029611 | Device and method for detecting projection objective wave-front aberration | Feng Tang, Changzhe Peng, Yunjun Lu, Peng Li | 2021-06-08 |
| 11009336 | Method for wavefront measurement of optical imaging system based on grating shearing interferometry | Yunjun Lu, Feng Tang | 2021-05-18 |
| 10969274 | Method for detecting wavefront aberration for optical imaging system based on grating shearing interferometer | Yunjun Lu, Feng Tang | 2021-04-06 |
| 9863841 | Measuring device having ideal wavefront generator for detecting point diffraction interferometric wavefront aberration of measured optical system and method for detecting wavefront aberration thereof | Feng Tang, Guoxian Zhang, Shifu Xu | 2018-01-09 |
| 9766154 | Multi field point aberration parallel metrology device and method for lithographic projection lens | Fengzhao Dai, Feng Tang, Yazhong Zheng | 2017-09-19 |
| 9658114 | Device for measuring point diffraction interferometric wavefront aberration and method for detecting wave aberration | Feng Tang, Peng Feng, Fudong Guo, Yunjun Lu | 2017-05-23 |
| 8035801 | Method for in-situ aberration measurement of optical imaging system in lithographic tools | Fan Wang, Mingying Ma | 2011-10-11 |