MM

Mingying Ma

SC Shanghai Micro Electronics Equipment (Group) Co.: 1 patents #81 of 212Top 40%
Overall (All Time): #3,265,946 of 4,157,543Top 80%
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Patent #TitleCo-InventorsDate
8035801 Method for in-situ aberration measurement of optical imaging system in lithographic tools Fan Wang, Xiangzhao Wang 2011-10-11