Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11668625 | Apparatus and method for detecting wavefront aberration of objective lens | Peng Li, Feng Tang, Xiangzhao Wang, Yang Liu, Xiangyu Wei +2 more | 2023-06-06 |
| 11604418 | Multi-channel device and method for measuring distortion and magnification of objective lens | Yisha Cao, Feng Tang, Xiangzhao Wang, Yang Liu | 2023-03-14 |
| 11561082 | Method for compensation during the process of wavefront reconstruction in grating-based lateral shearing interferometry | Peng Li, Feng Tang, Xiangzhao Wang, Yang Liu | 2023-01-24 |
| 11340118 | Method for high-accuracy wavefront measurement base on grating shearing interferometry | Feng Tang, Xiangzhao Wang | 2022-05-24 |
| 11215512 | Light intensity fluctuation-insensitive projection objective wave aberration detection device and detection method thereof | Feng Tang, Xiangzhao Wang, Changzhe Peng, Yang Liu | 2022-01-04 |
| 11029611 | Device and method for detecting projection objective wave-front aberration | Feng Tang, Changzhe Peng, Xiangzhao Wang, Peng Li | 2021-06-08 |
| 11009336 | Method for wavefront measurement of optical imaging system based on grating shearing interferometry | Feng Tang, Xiangzhao Wang | 2021-05-18 |
| 10969274 | Method for detecting wavefront aberration for optical imaging system based on grating shearing interferometer | Feng Tang, Xiangzhao Wang | 2021-04-06 |
| 9658114 | Device for measuring point diffraction interferometric wavefront aberration and method for detecting wave aberration | Feng Tang, Xiangzhao Wang, Peng Feng, Fudong Guo | 2017-05-23 |