Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11668625 | Apparatus and method for detecting wavefront aberration of objective lens | Peng Li, Feng Tang, Xiangzhao Wang, Yunjun Lu, Yang Liu +2 more | 2023-06-06 |
| 11215512 | Light intensity fluctuation-insensitive projection objective wave aberration detection device and detection method thereof | Feng Tang, Xiangzhao Wang, Yunjun Lu, Yang Liu | 2022-01-04 |
| 11029611 | Device and method for detecting projection objective wave-front aberration | Feng Tang, Xiangzhao Wang, Yunjun Lu, Peng Li | 2021-06-08 |