Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11121045 | Method for detecting ultra-small defect on wafer surface | Xianghua Hu, Gaoyu Wang, Guangzhi He, Xiaofang Gu | 2021-09-14 |
| 9269639 | Method of detecting and measuring contact alignment shift relative to gate structures in a semicondcutor device | Rongwei Fan, Feijue Liu, Yin Long, Hunglin Chen | 2016-02-23 |
| 9080863 | Method for monitoring alignment between contact holes and polycrystalline silicon gate | Hunglin Chen, Zhounan Wang, Yin Long, Mingsheng Guo | 2015-07-14 |
| 8987013 | Method of inspecting misalignment of polysilicon gate | Rongwei Fan, Hunglin Chen, Yin Long | 2015-03-24 |
| 8865482 | Method of detecting the circular uniformity of the semiconductor circular contact holes | Kai-Hsiang Wang, Hunglin Chen, Yin Long, MingShen Kuo | 2014-10-21 |
| 8658438 | Measurement of lateral diffusion of implanted ions in doped well region of semiconductor devices | Rongwei Fan, Yin Long, Kai-Hsiang Wang, Hunglin Chen | 2014-02-25 |