Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9739707 | Oil concentration measurement system and oil concentration measurement method | — | 2017-08-22 |
| 7648580 | Substrate processing method and substrate processing device | Katsuyoshi Nakatsukasa, Yoshiaki Sakaihara, Yoshihiro Haruki, Munenori Kawate | 2010-01-19 |
| 7437834 | Method of processing substrate and substrate processing apparatus | Katsuyoshi Nakatsukasa, Yoshiaki Sakaihara, Yoshihiro Haruki, Munenori Kawate | 2008-10-21 |
| 6637445 | Substrate processing unit | Katsuyoshi Nakatsukasa, Hirohumi Shoumori, Kenji Otokuni, Kazutoshi Watanabe, Hiroki Takahashi | 2003-10-28 |