Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7648580 | Substrate processing method and substrate processing device | Katsuyoshi Nakatsukasa, Kazuhisa Ogasawara, Yoshiaki Sakaihara, Munenori Kawate | 2010-01-19 |
| 7437834 | Method of processing substrate and substrate processing apparatus | Katsuyoshi Nakatsukasa, Kazuhisa Ogasawara, Yoshiaki Sakaihara, Munenori Kawate | 2008-10-21 |