Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7648580 | Substrate processing method and substrate processing device | Kazuhisa Ogasawara, Yoshiaki Sakaihara, Yoshihiro Haruki, Munenori Kawate | 2010-01-19 |
| 7437834 | Method of processing substrate and substrate processing apparatus | Kazuhisa Ogasawara, Yoshiaki Sakaihara, Yoshihiro Haruki, Munenori Kawate | 2008-10-21 |
| 6637445 | Substrate processing unit | Kazuhisa Ogasawara, Hirohumi Shoumori, Kenji Otokuni, Kazutoshi Watanabe, Hiroki Takahashi | 2003-10-28 |