Issued Patents All Time
Showing 126–150 of 186 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7943414 | Method for manufacturing SOI substrate | Hideto Ohnuma, Junpei Momo, Shunpei Yamazaki | 2011-05-17 |
| 7939426 | Manufacturing method of SOI substrate | Fumito Isaka, Sho Kato, Kosei Nei, Ryu Komatsu, Tatsuya Mizoi | 2011-05-10 |
| 7932164 | Method for manufacturing semiconductor substrate by using monitor substrate to obtain optimal energy density for laser irradiation of single crystal semiconductor layers | Masaki Koyama, Motoki NAKASHIMA | 2011-04-26 |
| 7920611 | Laser apparatus, laser irradiation method, and manufacturing method of semiconductor device | Hidekazu Miyairi, Tamae Takano, Masaki Koyama, Koichiro Tanaka | 2011-04-05 |
| 7897476 | Method of manufacturing SOI substrate | Shunpei Yamazaki, Eiji Higa, Yoji Nagano, Tatsuya Mizoi | 2011-03-01 |
| 7881350 | Laser apparatus, laser irradiation method, and manufacturing method of semiconductor device | Hidekazu Miyairi, Tamae Takano, Masaki Koyama | 2011-02-01 |
| 7867907 | Method for manufacturing semiconductor device | Hidekazu Miyairi, Yasuhiro Jinbo | 2011-01-11 |
| 7851318 | Semiconductor substrate and method for manufacturing the same, and method for manufacturing semiconductor device | Masaki Koyama, Fumito Isaka, Junpei Momo | 2010-12-14 |
| 7842584 | Method for manufacturing semiconductor device | Sho Kato, Fumito Isaka, Tetsuya Kakehata, Hiromichi Godo | 2010-11-30 |
| 7842583 | Method for manufacturing semiconductor substrate and method for manufacturing semiconductor device | Naoki Tsukamoto | 2010-11-30 |
| 7820524 | Manufacturing method of SOI substrate and manufacturing method of semiconductor device | Hidekazu Miyairi, Tatsuya Mizoi, Eiji Higa, Yoji Nagano | 2010-10-26 |
| 7816232 | Method for manufacturing semiconductor substrate and semiconductor substrate manufacturing apparatus | Masaki Koyama, Satohiro Okamoto | 2010-10-19 |
| 7811911 | Method for manufacturing semiconductor device | Hidekazu Miyairi, Yasuhiro Jinbo | 2010-10-12 |
| 7795734 | Semiconductor device and method of manufacturing the same | Atsuo Isobe, Shunpei Yamazaki, Chiho Kokubo, Koichiro Tanaka, Tatsuya Arao +1 more | 2010-09-14 |
| 7795111 | Manufacturing method of SOI substrate and manufacturing method of semiconductor device | Hidekazu Miyairi, Yurika Sato | 2010-09-14 |
| 7781308 | Method for manufacturing SOI substrate | Fumito Isaka, Sho Kato, Ryu Komatsu, Kosei Nei | 2010-08-24 |
| 7767547 | Manufacturing method of SOI substrate | Fumito Isaka, Sho Kato, Kosei Nei, Ryu Komatsu, Tatsuya Mizoi | 2010-08-03 |
| 7749818 | Semiconductor device and method of manufacturing the same | Atsuo Isobe, Shunpei Yamazaki, Chiho Kokubo, Koichiro Tanaka, Tatsuya Arao +2 more | 2010-07-06 |
| 7745310 | Method of manufacturing semiconductor device | Tatsuya Mizoi, Hidekazu Miyairi, Koichiro Tanaka | 2010-06-29 |
| 7736917 | Laser beam irradiation method and method of manufacturing a thin firm transistor | Kenji Kasahara, Aiko Shiga, Hidekazu Miyairi, Koichiro Tanaka, Koji Dairiki | 2010-06-15 |
| 7737506 | Semiconductor device and method of manufacturing the same | Atsuo Isobe, Shunpei Yamazaki, Chiho Kokubo, Koichiro Tanaka, Tatsuya Arao +2 more | 2010-06-15 |
| 7700463 | Method for manufacturing semiconductor device | — | 2010-04-20 |
| 7696031 | Method for manufacturing semiconductor device | Hironobu Shoji | 2010-04-13 |
| 7678668 | Manufacturing method of SOI substrate and manufacturing method of semiconductor device | Hideto Ohnuma, Tetsuya Kakehata, Kenichiro Makino | 2010-03-16 |
| 7670935 | Manufacturing method of semiconductor device | Shunpei Yamazaki, Hisashi Ohtani, Masaaki Hiroki, Koichiro Tanaka, Aiko Shiga +2 more | 2010-03-02 |