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Three-dimensional memory device with punch-through-resistant word lines and methods for forming the same |
Ryo Mochizuki, Michiaki Sano, Junji Oh, Yujin Terasawa, Hiroaki Namba |
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| 10381443 |
Bulb-shaped memory stack structures for direct source contact in three-dimensional memory device |
Kazuyo Matsumoto, Satoshi Shimizu, Hiroyuki Ogawa, Yohei Masamori, Jixin Yu +2 more |
2019-08-13 |
| 10381373 |
Three-dimensional memory device having a buried source line extending to scribe line and method of making thereof |
Yasuchika Okizumi, Michiru Hirayama, Naoto Norizuki, Satoshi Shimizu, Kimiaki Naruse |
2019-08-13 |
| 10020363 |
Bulb-shaped memory stack structures for direct source contact in three-dimensional memory device |
Hiroyuki Ogawa, Satoshi Shimizu, Kazuyo Matsumoto, Yohei Masamori, Jixin Yu +2 more |
2018-07-10 |
| 10008570 |
Bulb-shaped memory stack structures for direct source contact in three-dimensional memory device |
Jixin Yu, Kento KITAMURA, Tong Zhang, Chun Ge, Yanli Zhang +6 more |
2018-06-26 |
| 9991282 |
Three-dimensional memory device having passive devices at a buried source line level and method of making thereof |
Satoshi Shimizu, Hiroyuki Ogawa, Kento KITAMURA |
2018-06-05 |
| 9985098 |
Bulb-shaped memory stack structures for direct source contact in three-dimensional memory device |
Kazuyo Matsumoto, Satoshi Shimizu, Hiroyuki Ogawa, Yohei Masamori, Jixin Yu +2 more |
2018-05-29 |
| 9876031 |
Three-dimensional memory device having passive devices at a buried source line level and method of making thereof |
Satoshi Shimizu, Hiroyuki Ogawa, Kento KITAMURA |
2018-01-23 |
| 5773890 |
Semiconductor device that prevents peeling of a titanium nitride film |
Tomoyuki Uchiyama |
1998-06-30 |
| 5672907 |
Semiconductor device having character in BPSG film |
— |
1997-09-30 |
| 5502006 |
Method for forming electrical contacts in a semiconductor device |
— |
1996-03-26 |