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Method for forming interconnection line in semiconductor device and interconnection line structure |
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Semiconductor device and method of manufacturing the same |
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2008-03-11 |
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Method of forming interconnection lines for semiconductor device |
Kyoung-Woo Lee, Hong-Jae Shin, Jae Hak Kim, Seung Jin Lee, Ki-Kwan Park |
2007-03-20 |
| 6842028 |
Apparatus for testing reliability of interconnection in integrated circuit |
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| 6693446 |
Apparatus for testing reliability of interconnection in integrated circuit |
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2004-02-17 |
| 6690187 |
Apparatus for testing reliability of interconnection in integrated circuit |
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2004-02-10 |
| 6483162 |
Semiconductor device having improved metal line structure and manufacturing method therefor |
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2002-11-19 |
| 6333260 |
Semiconductor device having improved metal line structure and manufacturing method therefor |
Dong-chul Kwon, Hong-Jae Shin, Sung Jin Kim |
2001-12-25 |
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Low resistance interconnect for a semiconductor device and method of fabricating the same |
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2001-06-19 |
| 6004876 |
Low resistance interconnect for a semiconductor device and method of fabricating the same |
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1999-12-21 |
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Method of filling a contact hole in a semiconductor substrate with a metal |
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