Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11251022 | Gas supply assembly and substrate processing apparatus including the same | Kangmin Jeon, Dougyong Sung, Jongwoo Sun, Minkyu SUNG, Kimoon Jung +2 more | 2022-02-15 |