Issued Patents All Time
Showing 26–30 of 30 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6583025 | Method of forming a trench isolation structure comprising annealing the oxidation barrier layer thereof in a furnace | — | 2003-06-24 |
| 6566229 | Method of forming an insulating layer in a trench isolation type semiconductor device | Moon-han Park, Ju-Seon Goo, Jin-Hwa Heo, Hong-Gun Kim, Eun-Kee Hong | 2003-05-20 |
| 6251746 | Methods of forming trench isolation regions having stress-reducing nitride layers therein | Yung-Seob Yu, Bon-Young Koo, Byung Ki Kim, Seung-Mok Shin | 2001-06-26 |
| 6121110 | Trench isolation method for semiconductor device | Yu-Gyun Shin, Han-Sin Lee, Hyun-cheol Choe | 2000-09-19 |
| 5677232 | Methods of fabricating combined field oxide/trench isolation regions | Sung-Eui Kim | 1997-10-14 |