Issued Patents All Time
Showing 26–31 of 31 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6793767 | Wafer stage including electrostatic chuck and method for dechucking wafer using the wafer stage | Chang-Woong Chu, Kyeong-Koo Chi, Ji Soo Kim, Sang-Hun Seo | 2004-09-21 |
| 6767834 | Method of manufacturing a contact of a semiconductor device using cluster apparatus having at least one plasma pretreatment module | Kyeong-Koo Chi, Ji Soo Kim, Chang-Woong Chu, Sang-Hun Seo | 2004-07-27 |
| 6562651 | Method of manufacturing a semiconductor device having contact pads | Kyeong-Koo Chi, Jung-Sik Jeon | 2003-05-13 |
| 6537876 | Method of manufacturing a semiconductor capacitor having a hemispherical grain layer using a dry cleaning process | Kyu-hwan Chang, Young Min Kwon, Sang-lock Hah | 2003-03-25 |
| 6534921 | Method for removing residual metal-containing polymer material and ion implanted photoresist in atmospheric downstream plasma jet system | Sang-Hun Seo, Kyeong-Koo Chi, Ji Soo Kim, Chang-Woong Chu | 2003-03-18 |
| 6513538 | Method of removing contaminants from integrated circuit substrates using cleaning solutions | Kyu-hwan Chang, Young Min Kwon, Sang-lock Hah | 2003-02-04 |