Issued Patents All Time
Showing 26–28 of 28 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7001697 | Photomask having a transparency-adjusting layer, method of manufacturing the photomask, and exposure method using the photomask | Jong-Rak Park, Gi-Sung Yeo, Sung-Hoon Jang | 2006-02-21 |
| 6866968 | Photomask for off-axis illumination and method of fabricating the same | In-Kyun Shin, Jung Min Sohn, Hee-sun Yoon | 2005-03-15 |
| 6835507 | Mask for use in measuring flare, method of manufacturing the mask, method of identifying flare-affected region on wafer, and method of designing new mask to correct for flare | Won-tai Ki, Tae-Moon Jeong, Shun-Yong Zinn, Woo-Sung Han, Jung Min Sohn | 2004-12-28 |