Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10627206 | Sensor module for detecting a process environment in semiconductor equipment, a semiconductor manufacturing apparatus, and a method of manufacturing a semiconductor device | Young Ho Hwang, Dae Hee Lee, Dae Sung Jung, Dong-ouk KIM, Jong-min Song | 2020-04-21 |
| 10474184 | Designed waveform generator for semiconductor equipment, plasma processing apparatus, method of controlling plasma processing apparatus, and method of manufacturing semiconductor device | Hyun Bae Kim, Young-Hwan Choi, Jin Ho Kim | 2019-11-12 |
| 10281520 | Diagnosing an abnormal state of a substrate-processing apparatus | Dae Sung Jung, Jung Hwan Um | 2019-05-07 |
| 9843284 | System for controlling fault tolerance | Young Ho Hwang, Jang-Hwan Kim | 2017-12-12 |
| 9812372 | Electrostatic chuck assembly, semiconductor manufacturing apparatus having the same, and method of measuring temperature of electrostatic chuck | Youn Sok CHOI, Jeong Hyoun Sung | 2017-11-07 |
| 9306488 | Dual inverter system and method of controlling the same | Young Doo Yoon, Oh-Hyuk KWON, Jang-Hwan Kim, Jeong Hyoun Sung, So-hee Han | 2016-04-05 |
| 7692608 | Energy recovery circuit and energy recovering method using the same | Yun Kwon Jung, Bong Koo Kang, Ju Won Seo | 2010-04-06 |