Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10281520 | Diagnosing an abnormal state of a substrate-processing apparatus | Dae Sung Jung, Sang-Yoon Soh | 2019-05-07 |
| 9812293 | Dielectric window, plasma processing system including the window, and method of fabricating semiconductor device using the system | Sung Moon Park, Dong Wook Kim | 2017-11-07 |