Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9812372 | Electrostatic chuck assembly, semiconductor manufacturing apparatus having the same, and method of measuring temperature of electrostatic chuck | Youn Sok CHOI, Sang-Yoon Soh | 2017-11-07 |
| 9306488 | Dual inverter system and method of controlling the same | Sang-Yoon Soh, Young Doo Yoon, Oh-Hyuk KWON, Jang-Hwan Kim, So-hee Han | 2016-04-05 |
| 8981694 | Sensorless control apparatuses of motors and control methods thereof | Young Doo Yoon, Jang-Hwan Kim | 2015-03-17 |
| 8670107 | Maskless exposure apparatus and control method thereof | — | 2014-03-11 |
| 8619233 | Maskless exposure apparatus and pattern compensation method using the same | — | 2013-12-31 |
| 8599358 | Maskless exposure apparatuses and frame data processing methods thereof | — | 2013-12-03 |