Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9812372 | Electrostatic chuck assembly, semiconductor manufacturing apparatus having the same, and method of measuring temperature of electrostatic chuck | Jeong Hyoun Sung, Sang-Yoon Soh | 2017-11-07 |
| 9347419 | Electric field generating apparatus for combustion chamber | Hongbin Kim, Sang Ken Kauh, Kyoung-Min Shon | 2016-05-24 |