Issued Patents All Time
Showing 26–50 of 52 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7521331 | High dielectric film and related method of manufacture | Hong-Bae Park, Yu-Gyun Shin | 2009-04-21 |
| 7521357 | Methods of forming metal wiring in semiconductor devices using etch stop layers | Sang-Woo Lee, Gil-Heyun Choi, Jong-Myeong Lee, Jin-Ho Park | 2009-04-21 |
| 7494859 | Semiconductor device having metal gate patterns and related method of manufacture | Hag-Ju Cho, Taek-Soo Jeon, Hye-Lan Lee, Yu-Gyun Shin | 2009-02-24 |
| 7459372 | Methods of manufacturing a thin film including hafnium titanium oxide and methods of manufacturing a semiconductor device including the same | Hong-Bae Park, Yu-Gyun Shin | 2008-12-02 |
| 7452811 | Method for forming a wiring of a semiconductor device, method for forming a metal layer of a semiconductor device and apparatus for performing the same | Kyung-In Choi, Seong-Geon Park, You-Kyoung Lee, Gil-Heyun Choi, Jong-Myeong Lee +1 more | 2008-11-18 |
| 7410892 | Methods of fabricating integrated circuit devices having self-aligned contact structures | Hee-Sook Park, Gil-Heyun Choi, Kwang-Jin Moon, Hyun-Su Kim, Seung-Gil Yang | 2008-08-12 |
| 7399670 | Methods of forming different gate structures in NMOS and PMOS regions and gate structures so formed | Taek-Soo Jeon, Yu-Gyun Shin, Hong-Bae Park, Hag-Ju Cho, Hye-Lan Lee +2 more | 2008-07-15 |
| 7390719 | Method of manufacturing a semiconductor device having a dual gate structure | Taek-Soo Jeon, Yu-Gyun Shin, Hag-Ju Cho, Hye-Lan Lee, Sang-Yong Kim | 2008-06-24 |
| 7312150 | Method of forming cobalt disilicide layer and method of manufacturing semiconductor device using the same | Jong-Ho Yun, Gil-Heyun Choi, Woong-Hee Sohn, Hyun-Su Kim | 2007-12-25 |
| 7285493 | Methods of forming a metal layer using transition metal precursors | Gil-Heyun Choi, Kwang-Jin Moon, Hyun-Su Kim, Seung-Gil Yang | 2007-10-23 |
| 7214620 | Methods of forming silicide films with metal films in semiconductor devices and contacts including the same | Hyun-Su Kim, Gil-Heyun Choi, Jong-Ho Yun, Sug-Woo Jung, Eun-Ji Jung +1 more | 2007-05-08 |
| 7211506 | Methods of forming cobalt layers for semiconductor devices | Kwang-Jin Moon, Gil-Heyun Choi, Hyun-Su Kim | 2007-05-01 |
| 7172967 | Methods for forming cobalt layers including introducing vaporized cobalt precursors and methods for manufacturing semiconductor devices using the same | Hyun-Su Kim, Gil-Heyun Choi, Woong-Hee Sohn, Jong-Ho Yun, Kwang-Jin Moon | 2007-02-06 |
| 7105444 | Method for forming a wiring of a semiconductor device, method for forming a metal layer of a semiconductor device and apparatus for performing the same | Kyung-In Choi, Seong-Geon Park, You-Kyoung Lee, Gil-Heyun Choi, Jong-Myeong Lee +1 more | 2006-09-12 |
| 7098131 | Methods for forming atomic layers and thin films including tantalum nitride and devices including the same | Byung-Hee Kim, Kyung-In Choi, Gil-Heyun Choi, You-Kyoung Lee, Seong-Geon Park | 2006-08-29 |
| 7081409 | Methods of producing integrated circuit devices utilizing tantalum amine derivatives | Jong-Myeong Lee, Kyung-In Choi, Gil-Heyun Choi, You-Kyoung Lee, Seong-Geon Park +1 more | 2006-07-25 |
| 7056776 | Semiconductor devices having metal containing N-type and P-type gate electrodes and methods of forming the same | Seong-Geon Park, Gil-Heyun Choi, You-Kyoung Lee | 2006-06-06 |
| 7045842 | Integrated circuit devices having self-aligned contact structures | Hee-Sook Park, Gil-Heyun Choi, Kwang-Jin Moon, Hyun-Su Kim, Seung-Gil Yang | 2006-05-16 |
| 6590251 | Semiconductor devices having metal layers as barrier layers on upper or lower electrodes of capacitors | Hyun-Seok Lim, Yung-sook Chae, In-Sang Jeon, Gil-Heyun Choi | 2003-07-08 |
| 6478872 | Method of delivering gas into reaction chamber and shower head used to deliver gas | Yun-sook Chae, In-Sang Jeon, Sang In Lee, Kyu Wan Ryu | 2002-11-12 |
| 6458701 | Method for forming metal layer of semiconductor device using metal halide gas | Yun-sook Chae, Gil-Heyun Choi, In-Sang Jeon | 2002-10-01 |
| 6399491 | Method of manufacturing a barrier metal layer using atomic layer deposition | In-Sang Jeon, Hyun-Seok Lim, Gil-Heyun Choi | 2002-06-04 |
| 6348376 | Method of forming metal nitride film by chemical vapor deposition and method of forming metal contact and capacitor of semiconductor device using the same | Hyun-Seok Lim, In-Sang Jeon, Gil-Heyun Choi | 2002-02-19 |
| 6287965 | Method of forming metal layer using atomic layer deposition and semiconductor device having the metal layer as barrier metal layer or upper or lower electrode of capacitor | Hyun-Seok Lim, Yung-sook Chae, In-Sang Jeon, Gil-Heyun Choi | 2001-09-11 |
| 6197683 | Method of forming metal nitride film by chemical vapor deposition and method of forming metal contact of semiconductor device using the same | Chang-Soo Park, Yun-sook Chae, Sang In Lee | 2001-03-06 |