Issued Patents All Time
Showing 51–52 of 52 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6174809 | Method for forming metal layer using atomic layer deposition | Yun-sook Chae, Chang-Soo Park, Sang In Lee | 2001-01-16 |
| 6139700 | Method of and apparatus for forming a metal interconnection in the contact hole of a semiconductor device | Sang In Lee | 2000-10-31 |