Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12307651 | Method of detecting measurement error of SEM equipment and method of aligning SEM equipment | Nohong KWAK, Donyun Kim, Yunhyoung Nam, Kihyun Kim | 2025-05-20 |
| 12229944 | Defect detection method of deep learning-based semiconductor device and semiconductor element manufacturing method including the defect detection method | Kyenhee Lee, Sooryong Lee | 2025-02-18 |
| 11747721 | Method of forming shape on mask based on deep learning, and mask manufacturing method using the method of forming the shape on mask | Useong Kim, Woojoo Sim | 2023-09-05 |
| 11699227 | Method of verifying error of optical proximity correction model | Heungsuk Oh, Sangwook Park | 2023-07-11 |
| 11562934 | Manufacturing method of semiconductor device | Sooyong Lee, Bongsoo Kang, Jeeyong Lee | 2023-01-24 |