Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12307651 | Method of detecting measurement error of SEM equipment and method of aligning SEM equipment | Nohong KWAK, Yunhyoung Nam, Mincheol KANG, Kihyun Kim | 2025-05-20 |
| 12205267 | Pattern inspection method using pattern model | Nohong KWAK, Kihyun Kim, Yunhyoung Nam | 2025-01-21 |
| 11740073 | Method for measuring CD using scanning electron microscope | Jooho Kim, Yunhyoung Nam, Seungjin Lee, Dawoon Choi | 2023-08-29 |