Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7923684 | Methods, systems and computer program products for measuring critical dimensions of fine patterns using scanning electron microscope pictures and secondary electron signal profiles | Sang-Kil Lee, Kwang-Sik Kim, Kyung-Ho Jung, Sung-Joong Kim | 2011-04-12 |
| 7468512 | Computer program products for measuring critical dimensions of fine patterns using scanning electron microscope pictures and secondary electron signal profiles | Sang-Kil Lee, Kwang-Sik Kim, Kyung-Ho Jung, Sung-Joong Kim | 2008-12-23 |
| 7091485 | Methods and systems for measuring critical dimensions of fine patterns using scanning electron microscope pictures and secondary electron signal profiles | Sang-Kil Lee, Kwang-Sik Kim, Kyung-Ho Jung, Sung-Joong Kim | 2006-08-15 |
| 6440760 | Method of measuring etched state of semiconductor wafer using optical impedence measurement | Hyung-Suk Cho, Sang-Mun Chon, Sang-bong Choi, Chung-sam Chun | 2002-08-27 |