Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6440760 | Method of measuring etched state of semiconductor wafer using optical impedence measurement | Hyung-Suk Cho, Sang-Mun Chon, Sang-bong Choi, Min-Sub Kang | 2002-08-27 |