Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12205040 | Method of training deep learning model for predicting pattern characteristics and method of manufacturing semiconductor device | Yoonsung Bae, Seungho Gwak, Seunggun Byoun, Gilwoo Song, Younghoon Shin +3 more | 2025-01-21 |
| 11946881 | Inspection apparatus and inspection method using same | Martin Priwisch, Jongmin YOON, Suhwan Park, Junbum Park, Inkeun Baek +2 more | 2024-04-02 |
| 11320259 | Spectroscopic measuring apparatus and method, and method for fabricating semiconductor device using the measuring method | Soonyang Kwon, Jangryul Park, Yunje Cho | 2022-05-03 |