Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9791855 | Semiconductor process management system, semiconductor manufacturing system including the same, and method of manufacturing semiconductor | Dong Hoon Han, Do Hyung Kim, Sung-Hyup Kim, Ho Jun Kim | 2017-10-17 |
| 7170070 | Ion implanters having an arc chamber that affects ion current density | Ui Hui Kwon, Gyeong-Su Keum, Won-Young Chung, Kwang-Ho Cha, Young Tae Kim +3 more | 2007-01-30 |
| 7109132 | High density plasma chemical vapor deposition process | Young-kyou Park | 2006-09-19 |
| 6573180 | PECVD method of forming a tungsten silicide layer on a polysilicon layer | — | 2003-06-03 |