Issued Patents All Time
Showing 26–35 of 35 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7199019 | Method for forming tungsten contact plug | Ji-Soon Park, Eung-Joon Lee, Jung Wook Kim | 2007-04-03 |
| 7141512 | Method of cleaning semiconductor device fabrication apparatus | In-su Ha, Yoon-bon Koo, Cheon-su Han, Seung-Cheol Choi | 2006-11-28 |
| 6806135 | Method of manufacturing a semiconductor device using a two-step deposition process | In-Sun Park, Sang-Bum Kang, Jong-Sik Chun, Seong-Geon Park, In-su Ha | 2004-10-19 |
| 6590251 | Semiconductor devices having metal layers as barrier layers on upper or lower electrodes of capacitors | Sang-Bom Kang, Yung-sook Chae, In-Sang Jeon, Gil-Heyun Choi | 2003-07-08 |
| 6399491 | Method of manufacturing a barrier metal layer using atomic layer deposition | In-Sang Jeon, Sang-Bom Kang, Gil-Heyun Choi | 2002-06-04 |
| 6391769 | Method for forming metal interconnection in semiconductor device and interconnection structure fabricated thereby | Jong-Myeong Lee, Byung-Hee Kim, Gil-Heyun Choi, Sang In Lee | 2002-05-21 |
| 6372598 | Method of forming selective metal layer and method of forming capacitor and filling contact hole using the same | Sang-Bum Kang, Yun-sook Chae, Sang In Lee, Mee-Young Yoon | 2002-04-16 |
| 6358829 | Semiconductor device fabrication method using an interface control layer to improve a metal interconnection layer | Mee-Young Yoon, Sang In Lee | 2002-03-19 |
| 6348376 | Method of forming metal nitride film by chemical vapor deposition and method of forming metal contact and capacitor of semiconductor device using the same | Sang-Bom Kang, In-Sang Jeon, Gil-Heyun Choi | 2002-02-19 |
| 6287965 | Method of forming metal layer using atomic layer deposition and semiconductor device having the metal layer as barrier metal layer or upper or lower electrode of capacitor | Sang-Bom Kang, Yung-sook Chae, In-Sang Jeon, Gil-Heyun Choi | 2001-09-11 |