Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7566667 | Methods of fabricating a semiconductor device having a barrier metal layer and devices formed thereby | Hyun-Young Kim, In-Sun Park, Hyun-Deok Lee | 2009-07-28 |
| 7375025 | Method for forming a metal silicide layer in a semiconductor device | In-Sun Park, Kwan-Jong Roh | 2008-05-20 |
| 7311109 | Method for cleaning a processing chamber and method for manufacturing a semiconductor device | Jung Wook Kim, Hyeon-Deok Lee, Jin-Gi Hong, Ji-Soon Park | 2007-12-25 |
| 7199019 | Method for forming tungsten contact plug | Ji-Soon Park, Hyun-Seok Lim, Jung Wook Kim | 2007-04-03 |
| 7005373 | Method for forming a metal silicide layer in a semiconductor device | In-Sun Park, Kwan-Jong Roh | 2006-02-28 |
| 6797618 | Method for forming silicide film of a semiconductor device | In-Sun Park, Ji-Soon Park | 2004-09-28 |
| 6355554 | Methods of forming filled interconnections in microelectronic devices | Gil-Heyun Choi, Byeong-Jun Kim | 2002-03-12 |
| 6329276 | Method of forming self-aligned silicide in semiconductor device | Ja-Hum Ku, Soo-geun Lee, Chul-Sung Kim, Tae-Wook Seo, Joo-Hyuk Chung | 2001-12-11 |