Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7538046 | Method of cleaning semiconductor device fabrication apparatus | In-su Ha, Hyun-Seok Lim, Cheon-su Han, Seung-Cheol Choi | 2009-05-26 |
| 7141512 | Method of cleaning semiconductor device fabrication apparatus | In-su Ha, Hyun-Seok Lim, Cheon-su Han, Seung-Cheol Choi | 2006-11-28 |