Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7538046 | Method of cleaning semiconductor device fabrication apparatus | Yoon-bon Koo, Hyun-Seok Lim, Cheon-su Han, Seung-Cheol Choi | 2009-05-26 |
| 7141512 | Method of cleaning semiconductor device fabrication apparatus | Yoon-bon Koo, Hyun-Seok Lim, Cheon-su Han, Seung-Cheol Choi | 2006-11-28 |
| 6806135 | Method of manufacturing a semiconductor device using a two-step deposition process | Hyun-Seok Lim, In-Sun Park, Sang-Bum Kang, Jong-Sik Chun, Seong-Geon Park | 2004-10-19 |