Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7771563 | Systems and methods for achieving isothermal batch processing of substrates used for the production of micro-electro-mechanical-systems | Robert W. Grant, Paul D. Mumbauer | 2010-08-10 |
| 6428847 | Vortex based CVD reactor | Robert W. Grant, Matthew D. Brubaker, Paul D. Mumbauer | 2002-08-06 |
| 6391804 | Method and apparatus for uniform direct radiant heating in a rapid thermal processing reactor | Robert W. Grant, Ronald F. Klopp, Theodore E. Farley, Paul D. Mumbauer | 2002-05-21 |
| 4852516 | Modular processing apparatus for processing semiconductor wafers | Richard Rubin, Richard C. Heim, Scott M. Pawenski | 1989-08-01 |
| 4722298 | Modular processing apparatus for processing semiconductor wafers | Richard Rubin, Richard C. Heim, Scott M. Pawenski | 1988-02-02 |