Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7771563 | Systems and methods for achieving isothermal batch processing of substrates used for the production of micro-electro-mechanical-systems | Robert W. Grant, Benjamin J. Petrone | 2010-08-10 |
| 7431853 | Selective etching of oxides from substrates | Paul Roman, Robert W. Grant | 2008-10-07 |
| 6428847 | Vortex based CVD reactor | Robert W. Grant, Benjamin J. Petrone, Matthew D. Brubaker | 2002-08-06 |
| 6391804 | Method and apparatus for uniform direct radiant heating in a rapid thermal processing reactor | Robert W. Grant, Benjamin J. Petrone, Ronald F. Klopp, Theodore E. Farley | 2002-05-21 |