| 7623427 |
Surface inspection by amplitude modulated specular light detection |
Wafaa Abdalla |
2009-11-24 |
| 7554670 |
Surface inspection by double pass laser doppler vibrometry |
Wafaa Abdalla |
2009-06-30 |
| 6881312 |
Ultra high throughput microfluidic analytical systems and methods |
Anne R. Kopf-Sill, Andrea W. Chow, Morten Jensen, Michael A. Spaid, Colin B. Kennedy +1 more |
2005-04-19 |
| 6547941 |
Ultra high throughput microfluidic analytical systems and methods |
Anne R. Kopf-Sill, Andrea W. Chow, Morten Jensen, Michael A. Spaid, Colin B. Kennedy +1 more |
2003-04-15 |
| 6358387 |
Ultra high throughput microfluidic analytical systems and methods |
Anne R. Kopf-Sill, Andrea W. Chow, Morten Jensen, Michael A. Spaid, Colin B. Kennedy +1 more |
2002-03-19 |
| 5978091 |
Laser-bump sensor method and apparatus |
Marco A. Krumbuegel, Reginald Lee, Ming M. Yang |
1999-11-02 |
| 5883714 |
Method and apparatus for detecting defects on a disk using interferometric analysis on reflected light |
George A. Burt, Jr., Joel Libove |
1999-03-16 |
| 5875029 |
Apparatus and method for surface inspection by specular interferometric and diffuse light detection |
Wayne Li, Igor Iosilevsky, Kenneth H. Womack, Vlastimil Cejna, George A. Burt, Jr. |
1999-02-23 |
| 5719840 |
Optical sensor with an elliptical illumination spot |
— |
1998-02-17 |
| 5189481 |
Particle detector for rough surfaces |
Kenneth P. Gross, Armand P. Neukermans |
1993-02-23 |
| 5076692 |
Particle detection on a patterned or bare wafer surface |
Armand P. Neukermans, Ralph C. Wolf, David A. Wolze, Stanley Stokowski |
1991-12-31 |