Substrate support lift pin

Assignee

• Applied Materials

Inventors

• David T. Or (23 patents)
• Keith Kuang-Kuo Koai (33 patents)
• Hiroyuki Takahama (9 patents)
• Takahiro Ito (135 patents)
• Koji Ota (35 patents)
• Hiroshi Sato (791 patents)

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