Combined susceptor, support, and lift system

Assignee

• Asm Ip Holding B.V.

Inventors

• Peipei Gao (5 patents)
• Wentao Wang (94 patents)
• Xing Lin (30 patents)
• Han Ye (4 patents)
• Ion Hong Chao (2 patents)
• Siyao Luan (3 patents)
• Alexandros T. Demos (75 patents)
• Fan Gao (16 patents)

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