Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Lithographic method and apparatus

Lithographic method and apparatus

US Patent 9958787 · Granted May 1, 2018

Estimated economic value: $11,280,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Vibration isolator for supporting a payload2025
Method for controlling a lithographic system2024
Gas mixing for fast temperature control of a cooling hood2023
Object stage bearing for lithographic apparatus2022
Lithographic apparatus and device manufacturing method involving a heater2022
Illumination optical system for projection lithography2022
Projection system and mirror and radiation source for a lithographic apparatus2021
Mask assembly2021
Lithographic apparatus and device manufacturing method2021
Pellicle attachment apparatus2021
Pellicle attachment apparatus2021
Lithographic apparatus and device manufacturing method2021