Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Methods and apparatus for improved metal ion filtering

Methods and apparatus for improved metal ion filtering

US Patent 9953813 · Granted Apr 24, 2018

Estimated economic value: $74,029,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Low resistivity metal contact stack2025
Methods and apparatus for enhancing selectivity of titanium and titanium silicid2025
Gap fill methods using catalyzed deposition2025
Methods for controlling contact resistance in cobalt-titanium structures2025
Pulsing plasma treatment for film densification2025
Methods for removing etch stop layers2025
UV-curable anti-smudge and anti-graffiti compositions2025
Method of depositing metal films2025
Selective metal removal with flowable polymer2025
Impurity removal in doped ALD tantalum nitride2025
Method of forming a metal liner for interconnect structures2025
Low resistivity tungsten film and method of manufacture2025