Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Radiation source

Radiation source

US Patent 9860966 · Granted Jan 2, 2018

Estimated economic value: $9,111,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Patterning device conditioning system and method2025
Method for controlling a lithographic system2024
Method for controlling a lithographic system2024
Prolonging optical element lifetime in an EUV lithography system2023
Prolonging optical element lifetime in an EUV lithography system2022
Illumination optical system for projection lithography2022
EUV exposure apparatus with reflective elements having reduced influence of temp2020
Lithographic apparatus and method2020
Graphene spectral purity filter2019
EUV exposure apparatus with reflective elements having reduced influence of temp2019
Beam delivery for EUV lithography2019
Beam delivery for EUV lithography2019