Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Lithographic apparatus and device manufacturing method

Lithographic apparatus and device manufacturing method

US Patent 9857698 · Granted Jan 2, 2018

Estimated economic value: $9,111,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Projection system and lithographic apparatus comprising said projection system2023
Projection system2019
Projection system2019
Projection system2019
Arrangement for actuating an element in a microlithographic projection exposure 2016
Projection system and lithographic apparatus2015
Positioning system, lithographic apparatus and device manufacturing method2015
Lithographic apparatus and device manufacturing method2014
Positioning system, lithographic apparatus and device manufacturing method2012
Device and method for use in optical record carrier systems2010
Lithographic apparatus and device manufacturing method2007
Lithographic apparatus and device manufacturing method2007