Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Projection system and lithographic apparatus comprising said projection system

Projection system and lithographic apparatus comprising said projection system

US Patent 11550227 · Granted Jan 10, 2023

Estimated economic value: $91,256,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Support, vibration isolation system, lithographic apparatus, object measurement 2023
Vibration isolation system and lithographic apparatus2022
Frame assembly, lithographic apparatus and device manufacturing method2022
Pneumatic support device and lithographic apparatus with pneumatic support devic2021
Lithographic apparatus, lithographic projection apparatus and device manufacturi2020
Vibration isolator, lithographic apparatus and device manufacturing method2020
Lithographic apparatus and device manufacturing method2019
Projection system2019
Support device, lithographic apparatus and device manufacturing method2018
Lithographic apparatus and device manufacturing method2018
Imprint lithographic apparatus and imprint lithographic method2017
Arrangement for actuating an element in a microlithographic projection exposure 2016