Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Dipole ring magnet assisted microwave radial line slot antenna plasma processing method and apparatus

Dipole ring magnet assisted microwave radial line slot antenna plasma processing method and apparatus

US Patent 9852893 · Granted Dec 26, 2017

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Apparatus for plasma processing2025
Plasma processing with broadband RF waveforms2025
ALD process with plasma treatment2025
Plasma enhanced film formation method2025
Process control enabled VDC sensor for plasma process2025
Radio frequency (RF) system with embedded RF signal pickups2025
RF voltage and current (V-I) sensors and measurement methods2024
Cyclic low temperature film growth processes2024
Apparatus for plasma processing2024
Parallel resonance antenna for radial plasma control2024
Methods for real-time pulse measurement and pulse timing adjustment to control p2024
Plasma processing with broadband RF waveforms2024