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Home › Microelectromechanical device having an oscillating mass and a forcing stage, and method of controlling a microelectromechanical device

Microelectromechanical device having an oscillating mass and a forcing stage, and method of controlling a microelectromechanical device

US Patent 9829319 · Granted Nov 28, 2017

Estimated economic value: $17,553,000 ⓘ

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