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Home › Micromechanical detection structure of a MEMS multi-axis gyroscope, with reduced drifts of corresponding electrical parameters

Micromechanical detection structure of a MEMS multi-axis gyroscope, with reduced drifts of corresponding electrical parameters

US Patent 11808574 · Granted Nov 7, 2023

Estimated economic value: $13,312,000 ⓘ

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