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Home › Closed-loop microelectromechanical accelerometer with compensation of spurious vibration modes and process for manufacturing a microelectromechanical accelerometer

Closed-loop microelectromechanical accelerometer with compensation of spurious vibration modes and process for manufacturing a microelectromechanical accelerometer

US Patent 11965906 · Granted Apr 23, 2024

Estimated economic value: $38,055,000 ⓘ

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