Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Apparatus for liquid treatment of wafer shaped articles

Apparatus for liquid treatment of wafer shaped articles

US Patent 9779979 · Granted Oct 3, 2017

Estimated economic value: $16,041,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Reduction of surface and embedded substrate charge by controlled exposure to vac2019
Reduction of surface and embedded substrate charge by controlled exposure to vac2019
Collector for use with an apparatus for treating wafer-shaped articles2018
Apparatus for liquid treatment of wafer shaped articles2018
Apparatus for liquid treatment of wafer shaped articles2018
Method and apparatus for processing wafer-shaped articles2017
Device and method for processing wafer-shaped articles2016
Device and method for processing wafer shaped articles2014