Method for reviewing a defect and apparatus

Assignee

• Hitachi High-Technologies
• The University Of Tokyo

Inventors

• Yuko Otani (18 patents)
• Shunji Maeda (170 patents)
• Yuta Urano (80 patents)
• Toshifumi Honda (113 patents)
• Takehiro Hirai (86 patents)
• Satoru Takahashi (94 patents)
• Kiyoshi Takamasu (4 patents)

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